Load Port

High cleanliness, High humidity control, high Communication compatibility and multi-control items to achieve better product quality and effectively control in product Q-time.
- Particle Free
Prevents particle penetration into FOUP
- Easy maintenance
Provide standard communication operation commands (ASCII) on PC.
- Communication compatibility
Can use RS232C or Mini-USB adjustable moving axis. User friendly and low maintenance.
- Originality
Use for both 8-inch and 12-inch wafers, high-efficiency inspection technology (wafer seated, thick/slice, cross)
- Customized
Base on customer requirement and specification to config customized modules.