High performance, high flexibility, high cleanliness. Based on customer requirement compatible with most vendor machines. Can design and manufacture your own EFEM machine in short time.
- Use SEMI standard specification 8-inch and 12-inch FOUP
- Optional n-sets wafer LoadPort
- Completable with most of robot arms to control the wafer pick/place function
- Wafer Pre-Aligner - Used to check wafer alignment position and read product ID numbers
- Provides process recipe parameters and data create.
- Adjustable sorting function to Drag and drop wafers in sequence or crosswise.
- TCP/IP network communication interface & SECS/GEM protocol (optional)
- Customized machine equipment configuration and parameters according to customer requirements
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